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Fundamental Principles of Optical Lithography : The Science of Microfabrication

By: (Author) Chris Mack

Extended Catalogue

Ksh 28,950.00

Format: Hardback or Cased Book

ISBN-10: 0470018933

ISBN-13: 9780470018934

Publisher: John Wiley & Sons Inc

Imprint: Wiley-Interscience

Country of Manufacture: GB

Country of Publication: GB

Publication Date: Nov 16th, 2007

Print length: 544 Pages

Weight: 1,140 grams

Dimensions (height x width x thickness): 24.90 x 17.10 x 3.70 cms

Product Classification: Mechanical engineering & materials
Applied optics

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Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

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